14 March 2022 Alignment method for rotary stage axis and optical axis in the polar coordinate direct laser writing system
Jinlun Zheng, Guodong Chen, Lu Wang, Xiaohang Sheng, Xing Liu, Tianyu Gao, Xiaozhong Xu, Peijun Zhao, Jingsong Wei
Author Affiliations +
Abstract

As a crucial part of a high-speed polar coordinate laser writing system, the alignment of the rotatory stage axis and the writing laser optical axis has been a key point that influences the accuracy of the whole system and the fabrication patterns. An alignment method of the rotatory stage axis and the writing laser optical axis is proposed. An alignment system is established and the imaging subsystem is calibrated by a high precision calibration object. A circle center lookup algorithm is applied to find the axis of the rotary stage. The accuracy of the alignment could reach 400 nm. The results of the alignment indicate that the proposed alignment method is a good method for the alignment of the rotary stage axis and the writing laser optical axis. The proposed alignment is useful in the fields of high-resolution maskless laser lithography in polar coordinates.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Jinlun Zheng, Guodong Chen, Lu Wang, Xiaohang Sheng, Xing Liu, Tianyu Gao, Xiaozhong Xu, Peijun Zhao, and Jingsong Wei "Alignment method for rotary stage axis and optical axis in the polar coordinate direct laser writing system," Optical Engineering 61(3), 034104 (14 March 2022). https://doi.org/10.1117/1.OE.61.3.034104
Received: 21 October 2021; Accepted: 23 February 2022; Published: 14 March 2022
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KEYWORDS
Calibration

Optical alignment

Imaging systems

Distortion

Cameras

Laser optics

Laser systems engineering

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