MAEIP Ti-N Thin Films

Tian Dazhun; Yin Zhigiang; Yan Zhanggen; Wang Guoqing; Xu Zhiqian

doi:10.1117/12.950018

27 February 1989 MAEIP Ti-N Thin Films

Tian Dazhun, Yin Zhigiang, Yan Zhanggen, Wang Guoqing, Xu Zhiqian

Proceedings Volume 1019, Thin Film Technologies III; (1989) https://doi.org/10.1117/12.950018
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

A magnetron arc evaporation ion plating(MAEIP) system has been constructed using disk titanium cathode Ti-N thin film with gold-like colour has been prepared using MAEIP techniques. The reflectances of Ti-N thin films in the wavelength range 350-2500 nm has been measured at near normal incidence by UV-365 spectrophotometer. X-ray diffraction analysis shows that the magnetron arc evaporation ion plated Ti-N thin films are polycrystalline TiN. The TiN thin films as decorative and hard coatings have been widely used in the watch-covers, watch-chains, Badding iron balls and tools, etc.

Citation Download Citation

Tian Dazhun, Yin Zhigiang, Yan Zhanggen, Wang Guoqing, and Xu Zhiqian "MAEIP Ti-N Thin Films", Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); https://doi.org/10.1117/12.950018

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