A programmable UVLED array with a collimated optics as transform lens as light field adjustable source

Jiun-Woei Huang

doi:10.1117/12.2514010

20 March 2019 A programmable UVLED array with a collimated optics as transform lens as light field adjustable source

Jiun-Woei Huang

Proceedings Volume 10961, Optical Microlithography XXXII; 109610T (2019) https://doi.org/10.1117/12.2514010
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

To achieve the smallest line width of IC requires the spherical and coma aberration free lithography optics. Once the aberration of lens is formed, it is hard to amend the mask to original requirement, unless the light pattern figure is adjustable. A programmable UVLED array with a collimated lens as Fourier transfer lens forms an adjustable pattern as the intensity profile to amend the aberration of mask to form aberration free mask intensity pattern into wafer. A 25 X 25 UVLED array with collimated lens is applied to correct the aberration contained mask, is to form a corrected pattern under the requirement for reducing aberration mask to form a smallest line width.

Citation Download Citation

Jiun-Woei Huang "A programmable UVLED array with a collimated optics as transform lens as light field adjustable source", Proc. SPIE 10961, Optical Microlithography XXXII, 109610T (20 March 2019); https://doi.org/10.1117/12.2514010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available