Design and test of a compound curved beam flexure with off-axis actuation for precision optical alignment

Brian C. Cox

doi:10.1117/12.2529271

30 August 2019 Design and test of a compound curved beam flexure with off-axis actuation for precision optical alignment

Brian C. Cox

Author Affiliations +

Proceedings Volume 11100, Optomechanical Engineering 2019; 1110004 (2019) https://doi.org/10.1117/12.2529271
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

A novel curved beam compound flexure has been developed for alignment of multiple aspheric optics on a motorized rotation stage. This new flexure design combines design aspects of compound flexure stages with off-axis actuation to reduce size of the adjustment stage while maintaining relatively large travel range. The flexure design presented provides alignment for ten 12.7 mm diameter optics; each optic position’s flexure has an adjustment resolution of 0.6 microns and 1.0 mm of travel. This flexure design also includes built-in hard stops to minimize over-travel during adjustment, and engineered features to minimize tilt and rotation during adjustment. Design optimization of the flexure and finite element models are presented with design comparisons to previous eccentric adjuster designs.

Conference Presentation

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Brian C. Cox "Design and test of a compound curved beam flexure with off-axis actuation for precision optical alignment", Proc. SPIE 11100, Optomechanical Engineering 2019, 1110004 (30 August 2019); https://doi.org/10.1117/12.2529271

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