Current development status of MOCVD and its process for UVLED application towards post COVID-19

Akinori Ubukata; Yoshiki Yano; Junya Yoshinaga; Tadanobu Arimura; Shuichi Koseki; Koh Matsumoto

doi:10.1117/12.2585099

5 March 2021 Current development status of MOCVD and its process for UVLED application towards post COVID-19

Akinori Ubukata, Yoshiki Yano, Junya Yoshinaga, Tadanobu Arimura, Shuichi Koseki, Koh Matsumoto

Proceedings Volume 11706, Light-Emitting Devices, Materials, and Applications XXV; 117060L (2021) https://doi.org/10.1117/12.2585099
Event: SPIE OPTO, 2021, Online Only

Abstract

Through development effort of MOCVD for LED application, we attempt to find new application towards post COVID-19. UVLED has feature of small size and high speed response which is different from mercury lamps while output power and/or wall plug efficiency is not matured. Development status of MOCVD and its process for UVLED process is presented. Ex-situ high temperature furnace for AlN template exhibit excellent crystalline quality. Ex-situ dry cleaning tool is utilized for cleaning MOCVD components without Cl contamination.

Conference Presentation

Citation Download Citation

Akinori Ubukata, Yoshiki Yano, Junya Yoshinaga, Tadanobu Arimura, Shuichi Koseki, and Koh Matsumoto "Current development status of MOCVD and its process for UVLED application towards post COVID-19", Proc. SPIE 11706, Light-Emitting Devices, Materials, and Applications XXV, 117060L (5 March 2021); https://doi.org/10.1117/12.2585099

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