In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

D. Moszko; O. Faehnle; C. Vogt; D. Kim

doi:10.1117/12.2596034

7 June 2021 In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

D. Moszko, O. Faehnle, C. Vogt, D. Kim

Author Affiliations +

Proceedings Volume 11853, Eighth European Seminar on Precision Optics Manufacturing; 118530E (2021) https://doi.org/10.1117/12.2596034
Event: Eighth European Seminar on Precision Optics Manufacturing, 2021, Teisnach, Germany

Abstract

In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.

Citation Download Citation

D. Moszko, O. Faehnle, C. Vogt, and D. Kim "In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization", Proc. SPIE 11853, Eighth European Seminar on Precision Optics Manufacturing, 118530E (7 June 2021); https://doi.org/10.1117/12.2596034

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