Spectra of high energy ions as debris in laser-produced plasma EUV source

Yuto Nakayama; Hiromu Kawasaki; Takeshi Higashiguchi

doi:10.1117/12.2601122

23 August 2021 Spectra of high energy ions as debris in laser-produced plasma EUV source

Yuto Nakayama, Hiromu Kawasaki, Takeshi Higashiguchi

Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology; 119080P (2021) https://doi.org/10.1117/12.2601122
Event: Photomask Japan 2021, 2021, Online Only

Abstract

We evaluated the charge-separated spectra of highly charged suprathermal gadolinium (Gd) ions from a 1064-nm, nanosecond laser-produced plasma (LPP) extreme ultraviolet (EUV) source developed for beyond EUV (BEUV) lithography. The charge distribution of these suprathermal ions emitted from a solid planar Gd target was measured by an electrostatic energy analyzer (ESA). The maximum ionic charge state was observed to be Z = 16 and to possess a maximum energy of about 15 keV at the optimum laser intensity of 2 x 10¹² W/cm2 to produce the efficient 6.7-nm EUV emission. This evaluation provides important information essential for the development of debris mitigation schemes in the BEUV source for next generation lithography.

Citation Download Citation

Yuto Nakayama, Hiromu Kawasaki, and Takeshi Higashiguchi "Spectra of high energy ions as debris in laser-produced plasma EUV source", Proc. SPIE 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology, 119080P (23 August 2021); https://doi.org/10.1117/12.2601122

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