Optical element sub-surface defect detection combining fluorescence and scattering imaging

Qinxiao Liu; Rui Dong; Hongjie Liu; Fang Wang; Dongxia Hu; Ye Tian

doi:10.1117/12.2606775

24 November 2021 Optical element sub-surface defect detection combining fluorescence and scattering imaging

Qinxiao Liu, Rui Dong, Hongjie Liu, Fang Wang, Dongxia Hu, Ye Tian

Proceedings Volume 12065, AOPC 2021: Optical Sensing and Imaging Technology; 1206530 (2021) https://doi.org/10.1117/12.2606775
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

Fused silica optical elements are widely used in large high-power laser devices, and the subsurface defects of optical elements directly aﬀect the laser damage threshold and imaging quality. These defects are distributed within a few to tens of microns from the surface and cannot be detected by conventional imaging methods. The characteristics of small size, low density and wide distribution range make it diﬃcult to detect nondestructively, eﬀectively and quickly with conventional methods. In order to solve the above problems, an experimental system was built based on the principles of photoluminescence and dark ﬁeld scattering. Use the diﬀerent characteristics of ﬂuorescence image and scattering image to carry out the research of subsurface defect detection. First, preprocess the original image. Second, calculate the oﬀset of adjacent images, perform background homogenization processing on the image, and stitch the sub-aperture images, and then segment the full-aperture image. Then, a more eﬀective subsurface defect extraction algorithm is proposed. Finally, etch the sample with HF and observe it under a microscope. Experimental results show that this method can detect weak defects on the surface and sub-surface at the same time, and can eﬀectively separate individual sub-surface defects. This method has the advantages of lossless, fast and high precision. Moreover, based on a large amount of data, analysis and summary of the causes of defects, distribution characteristics, etc.. This method can provide certain guidance for the evaluation of laser damage threshold and processing technology of optical components in high-power laser devices.

Citation Download Citation

Qinxiao Liu, Rui Dong, Hongjie Liu, Fang Wang, Dongxia Hu, and Ye Tian "Optical element sub-surface defect detection combining fluorescence and scattering imaging", Proc. SPIE 12065, AOPC 2021: Optical Sensing and Imaging Technology, 1206530 (24 November 2021); https://doi.org/10.1117/12.2606775

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KEYWORDS

Luminescence

Scattering

Optical components

Image processing

Defect detection

Electron multiplying charge coupled devices

Etching

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