A prediction algorithm for the smoothing process of large-aperture optical components with complex periodic middle-spatial frequency errors

Jing Hou; Shi-wei Liu; Xian-hua Chen; Qing-hua Zhang; Jian Wang; Bo Zhong; Wen-hui Deng

doi:10.1117/12.2605254

13 December 2021 A prediction algorithm for the smoothing process of large-aperture optical components with complex periodic middle-spatial frequency errors

Jing Hou, Shi-wei Liu, Xian-hua Chen, Qing-hua Zhang, Jian Wang, Bo Zhong, Wen-hui Deng

Author Affiliations +

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 120710B (2021) https://doi.org/10.1117/12.2605254
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

Due to the complexity and inhomogeneity of the distribution of the middle-spatial frequency errors (MSFE), the existing theoretical models cannot realize the manufacturability prediction of the smoothing process for the MSFE on the largeaperture optical components. Therefore, based on the parameterized time-domain smoothing model and the idea of regional division, a prediction algorithm suitable for the smoothing process of the MSFE in complex periods is proposed in this paper. The relevant verifiable experiments are carried out. The prediction results are in good agreement with the real data, which indicates that the prediction algorithm proposed in this paper can be applied to predict the smoothing process of the MSFE of large-aperture optical components and guide the polishing process.

Citation Download Citation

Jing Hou, Shi-wei Liu, Xian-hua Chen, Qing-hua Zhang, Jian Wang, Bo Zhong, and Wen-hui Deng "A prediction algorithm for the smoothing process of large-aperture optical components with complex periodic middle-spatial frequency errors", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 120710B (13 December 2021); https://doi.org/10.1117/12.2605254

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KEYWORDS

Polishing

Optical components

Surface finishing

Algorithms

Mathematical modeling

Optics manufacturing

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