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29 April 2022 On the laser micromachining of thin copper-molybdenum alloy films
D. A Nozhkin, A. A. Serdobintsev, I. O. Kozhevnikov, V. V. Galushka, A. M. Pavlov, A. V. Starodubov, N. M. Ryskin
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Proceedings Volume 12193, Laser Physics, Photonic Technologies, and Molecular Modeling; 121930J (2022) https://doi.org/10.1117/12.2634207
Event: XXV Annual Conference Saratov Fall Meeting 2021; and IX Symposium on Optics and Biophotonics, 2021, Saratov, Russian Federation
Abstract
Currently, methods of laser micromachining of various kinds of microsized structures are actively developed by scientists and engineers in a variety of fields. Particularly, laser micromachining allows for selective ablation of thin metal films on dielectric substrates in order to create planar conductive structures with rather complex patterns. Meander-like structures on dielectric substrates can serve as a slow-wave structure in perspective compact millimeter band vacuum electronic devices such as traveling-wave tubes. Thus, the aim of this work was to prepare conductive planar structures from thin metal coatings based on a copper-molybdenum alloy. Copper-molybdenum thin films were deposited onto dielectric substrates by magnetron co-sputtering. Then the coatings were micromachined using a nanosecond pulsed laser to form a series of planar structures in the shape of strips of varied width. Deposited coppermolybdenum thin films after laser micromachining suffer from lack of adhesion to the substrates. Possible way to overcome this issue is use of an adhesion sublayer such as titanium or chromium.
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D. A Nozhkin, A. A. Serdobintsev, I. O. Kozhevnikov, V. V. Galushka, A. M. Pavlov, A. V. Starodubov, and N. M. Ryskin "On the laser micromachining of thin copper-molybdenum alloy films", Proc. SPIE 12193, Laser Physics, Photonic Technologies, and Molecular Modeling, 121930J (29 April 2022); https://doi.org/10.1117/12.2634207
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KEYWORDS
Micromachining
Thin films
Pulsed laser operation
Laser ablation
Laser irradiation
Laser processing
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