Silicon–metal and silicon–silicon ultrafast laser welding with domesticated filaments

Maxime Chambonneau; Qingfeng Li; Markus Blothe; Vladimir Yu. Fedorov; Stelios Tzortzakis; Stefan Nolte

doi:10.1117/12.2652940

17 March 2023 Silicon–metal and silicon–silicon ultrafast laser welding with domesticated filaments

Maxime Chambonneau, Qingfeng Li, Markus Blothe, Vladimir Yu. Fedorov, Stelios Tzortzakis, Stefan Nolte

Proceedings Volume 12409, Laser-based Micro- and Nanoprocessing XVII; 1240903 (2023) https://doi.org/10.1117/12.2652940
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

We demonstrate for the first time ultrafast laser welding in the silicon–metal and silicon–silicon configurations, with focused infrared picosecond pulses. This achievement relies on accurate characterizations of filamentation in silicon with nonlinear propagation imaging. In the silicon–metal configuration, precompensating for the nonlinear focal shift prior to the welding yields bonding strengths > 1 MPa. By combining this filament relocation technique with metallic nanolayer deposition at the interface to exalt the energy deposition, similar bonding strength values are obtained in the silicon–silicon configuration.

Conference Presentation

Citation Download Citation

Maxime Chambonneau, Qingfeng Li, Markus Blothe, Vladimir Yu. Fedorov, Stelios Tzortzakis, and Stefan Nolte "Silicon–metal and silicon–silicon ultrafast laser welding with domesticated filaments", Proc. SPIE 12409, Laser-based Micro- and Nanoprocessing XVII, 1240903 (17 March 2023); https://doi.org/10.1117/12.2652940

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available