Prototyping of silicon nitride photonic integrated circuits for visible and near-infrared applications

Cameron Horvath; Jocelyn N. Westwood-Bachman; Kevin Setzer; Alexandria McKinlay; Cameron M. Naraine; Hamidu M. Mbonde; Bruno L. Segat Frare; Pooya Torab Ahmadi; Peter Mascher; Jonathan D. B. Bradley; Mirwais Aktary

doi:10.1117/12.2647576

17 March 2023 Prototyping of silicon nitride photonic integrated circuits for visible and near-infrared applications

Cameron Horvath, Jocelyn N. Westwood-Bachman, Kevin Setzer, Alexandria McKinlay, Cameron M. Naraine, Hamidu M. Mbonde, Bruno L. Segat Frare, Pooya Torab Ahmadi, Peter Mascher, Jonathan D. B. Bradley, Mirwais Aktary

Author Affiliations +

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242404 (2023) https://doi.org/10.1117/12.2647576
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We describe a prototyping process for silicon nitride photonic integrated circuits, targeting applications in the visible and near-infrared wavelength ranges. The platform is based on direct-write electron beam lithography technology and provides a route toward the rapid fabrication of passive and thermo-optic active photonic devices. The fabrication turnaround time is on the order of several weeks, and critical feature sizes are demonstrated down to 100 nm which enables the fabrication of subwavelength metastructures. Two waveguiding material thicknesses have been demonstrated, 150 nm for visible light applications and 400 nm for infrared.

Conference Presentation

Citation Download Citation

Cameron Horvath, Jocelyn N. Westwood-Bachman, Kevin Setzer, Alexandria McKinlay, Cameron M. Naraine, Hamidu M. Mbonde, Bruno L. Segat Frare, Pooya Torab Ahmadi, Peter Mascher, Jonathan D. B. Bradley, and Mirwais Aktary "Prototyping of silicon nitride photonic integrated circuits for visible and near-infrared applications", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242404 (17 March 2023); https://doi.org/10.1117/12.2647576

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available