Maximal absorption of ultrathin TiN absorber film for microbolometer applications (Conference Presentation)

Ting Shan S. Luk; Thomas Harris; Oleg Mitrofanov; Ethan A. Scott; Guangping Xu; Willard Ross; John Nogan; Sergei Ivanov; Oana Niculescu

doi:10.1117/12.2665978

12 June 2023 Maximal absorption of ultrathin TiN absorber film for microbolometer applications (Conference Presentation)

Ting Shan S. Luk, Thomas Harris, Oleg Mitrofanov, Ethan A. Scott, Guangping Xu, Willard Ross, John Nogan, Sergei Ivanov, Oana Niculescu

Author Affiliations +

Proceedings Volume 12536, Thermosense: Thermal Infrared Applications XLV; 125360R (2023) https://doi.org/10.1117/12.2665978
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

Ultrathin absorber can improve specific detectivity and response time of microbolometers. We experimentally demonstrate an average absorptance of 48% +/- 2.5% in the 8-13 microns (769-1250 1/cm) spectral range in 10nm thick titanium nitride (TiN), a value bordering on the 50% fundamental absorptance limit for a suspended thin film. Such absorptance is close to the fundamental limit of 50% for free-standing ultrathin films.

Conference Presentation

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Ting Shan S. Luk, Thomas Harris, Oleg Mitrofanov, Ethan A. Scott, Guangping Xu, Willard Ross, John Nogan, Sergei Ivanov, and Oana Niculescu "Maximal absorption of ultrathin TiN absorber film for microbolometer applications (Conference Presentation)", Proc. SPIE 12536, Thermosense: Thermal Infrared Applications XLV, 125360R (12 June 2023); https://doi.org/10.1117/12.2665978

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