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28 September 2023 Investigation of ultrafast laser stress generation in fused silica, Corning Eagle XG glass, Corning ULE glass, and sapphire
Kevin A. Laverty, Daewook Kim, James B. Johnson, Michael A. Echter, Brandon D. Chalifoux
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Proceedings Volume 12669, Optomechanical Engineering 2023; 1266907 (2023) https://doi.org/10.1117/12.2677619
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States
Abstract
Previous work has demonstrated the feasibility of using ultrafast laser generated stress to deform fused silica substrates to a desired flatness in a process called ultrafast laser stress figuring (ULSF). Materials other than fused silica may offer superior optomechanical properties that are more suited to certain applications or environments. In this work we explore the stress generated by focused ultrafast laser pulses in several common optical materials: Corning Ultra Low Expansion (ULE) glass, Corning Eagle XG glass, fused silica, and sapphire. Using a laser polarization state perpendicular to the writing direction, we find that the laser induced stress depends on the energy of the ultrafast laser pulses, the distance between two adjacent focused pulses, and the repetition rate at which the pulses are delivered into the material. Each material explored showcases unique dependence on these parameters. The results from this investigation will be used to characterize the potential equivalent material removal rates that would be theoretically achievable by ultrafast laser stress figuring for commercially available sapphire and Eagle XG substrates.
(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Kevin A. Laverty, Daewook Kim, James B. Johnson, Michael A. Echter, and Brandon D. Chalifoux "Investigation of ultrafast laser stress generation in fused silica, Corning Eagle XG glass, Corning ULE glass, and sapphire", Proc. SPIE 12669, Optomechanical Engineering 2023, 1266907 (28 September 2023); https://doi.org/10.1117/12.2677619
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KEYWORDS
Silica
Sapphire
Ultrafast phenomena
Ultrafast lasers
Glasses
Laser processing
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