Broadband anti-reflection coating with diamond and PTFE for terahertz detectors

J. M. Wang; K. M. Zhou; B. W. Fan; W. Miao; W. Zhang; Y. Ren; S. C. Shi

doi:10.1117/12.2686643

26 November 2023 Broadband anti-reflection coating with diamond and PTFE for terahertz detectors

J. M. Wang, K. M. Zhou, B. W. Fan, W. Miao, W. Zhang, Y. Ren, S. C. Shi

Proceedings Volume 12776, Infrared, Millimeter-Wave, and Terahertz Technologies X; 127760B (2023) https://doi.org/10.1117/12.2686643
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

In this paper, we present a wideband antireflection coating designed for high-resistivity silicon and alumina lenses used in cryogenic terahertz detectors. A dual-layer coating structure based on diamond and polytetrafluoroethylene (PTFE) films is employed to achieve high transmittance in a wide frequency range, the film thickness of diamond and PTFE has been precisely controlled by mature microwave plasma chemical vapor deposition (MPCVD) and thermal spraying technology. The transmittances of coated silicon sample was measured within the frequency ranges of 0.3-0.5 THz using the Quasi Optical Vector Network Analyzers (QO-VNA). The measured transmittance of the one side coated silicon sample accords well with the simulation results, which demonstrates the accuracy of the coating process. A remarkable transmittance level of up to 99% can be achieved by applying the AR coating to silicon lens according to the simulations. This wideband antireflection coating can be applied to cryogenic terahertz detectors, such as superconducting hot electron bolometer (HEB) detectors and superconducting kinetic inductance (KIDs) detectors.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

J. M. Wang, K. M. Zhou, B. W. Fan, W. Miao, W. Zhang, Y. Ren, and S. C. Shi "Broadband anti-reflection coating with diamond and PTFE for terahertz detectors", Proc. SPIE 12776, Infrared, Millimeter-Wave, and Terahertz Technologies X, 127760B (26 November 2023); https://doi.org/10.1117/12.2686643

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