Determination of PMMA etch rates using VASE modeling

V. Vazquez; Z. Kranefeld; J. H. McElearney; T. E. Vandervelde

doi:10.1117/12.3002035

11 March 2024 Determination of PMMA etch rates using VASE modeling

V. Vazquez, Z. Kranefeld, J. H. McElearney, T. E. Vandervelde

Proceedings Volume 12880, Physics and Simulation of Optoelectronic Devices XXXII; 128800T (2024) https://doi.org/10.1117/12.3002035
Event: SPIE OPTO, 2024, San Francisco, California, United States

Conference Poster

Abstract

Variable angle spectroscopic ellipsometry (VASE) was used to determine the thicknesses of polymethyl methacrylate (PMMA) on Si before and after etching with two different etchants (CF₄ + O₂ and Argon). Once a complete optical model for a base PMMA on Si sample was created, it was applied to all etched samples to determine thicknesses. Despite some minor changes to the optical behavior of PMMA caused by the Ar etching, our ability to fit to observed interference peaks remained unaffected. This technique allows for nanometer accurate thickness measurements, which is an improvement from current thickness measurement methods such as stylus profilometry.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

V. Vazquez, Z. Kranefeld, J. H. McElearney, and T. E. Vandervelde "Determination of PMMA etch rates using VASE modeling", Proc. SPIE 12880, Physics and Simulation of Optoelectronic Devices XXXII, 128800T (11 March 2024); https://doi.org/10.1117/12.3002035

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available