Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source

Takeru Niinuma; Tsukasa Sugiura; Masaki Kume; Yuto Nakayama; Hiroki Morita; Atsushi Sunahara; Shinichi Namba; Takeshi Higashiguchi

doi:10.1117/12.2687366

29 September 2023 Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source

Takeru Niinuma, Tsukasa Sugiura, Masaki Kume, Yuto Nakayama, Hiroki Morita, Atsushi Sunahara, Shinichi Namba, Takeshi Higashiguchi

Author Affiliations +

Proceedings Volume 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; 129150L (2023) https://doi.org/10.1117/12.2687366
Event: Photomask Japan 2023, 2023, Online Only

Abstract

We evaluated the charge-separated energy spectra of the suprathermal highly charged gadolinium (Gd) ions as debris from a laser-produced plasma (LPP). Laser pulses with pulse durations of 6 ns and 150 ps were irradiated to a solid planar Gd target. Charge-separated suprathermal Gd ions from an LPP were measured using an electrostatic energy analyzer (ESA). The maximum ionic charge state was q = 16, and the maximum energy was about 30 keV (q = 16) at the pulse duration of 150 ps under the laser intensity of I_L = 2 × 10¹² W/cm². At the pulse duration of 6 ns under the same laser intensity of I_L = 2 × 10¹² W/cm² by a control of a laser pulse energy and a focal spot diameter, the maximum ionic charge state was q = 15, and the maximum energy was 15 keV (q = 10), approximately half of that in the case of the pulse duration of 150 ps.

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Takeru Niinuma, Tsukasa Sugiura, Masaki Kume, Yuto Nakayama, Hiroki Morita, Atsushi Sunahara, Shinichi Namba, and Takeshi Higashiguchi "Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source", Proc. SPIE 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, 129150L (29 September 2023); https://doi.org/10.1117/12.2687366

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