Properties of reactively deposited SiC and GeC alloys

Peter M. Martin; John W. Johnston; Wendy D. Bennett

doi:10.1117/12.22400

1 December 1990 Properties of reactively deposited SiC and GeC alloys

Peter M. Martin, John W. Johnston, Wendy D. Bennett

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22400
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Thin-film silicon carbide (SiCi) and germanium carbon (Ge,Ci) alloy coatings with low Üifrared optical absorption have been fabricated by DC- and RF-reactive magnetron sputtering. The optical and mechanical properties of the coatings depend on composition determined by deposition conditions. The refractive index and optical absorption coefficient of SiCi. alloys were varied from those of amorphous Si to those near diamond-like carbon (DLC) by increasing C content. The band edge shifted below 1.2 eV with C content as high as 0.8. The useful range of the SiCi coatings was extended to wavelengths as low as 1 jim. The useful transparency range of GeCi coatings is from 3 to 12 jim. The refractive index of GeCi coatings was varied from 4.2 of amorphous Ge to near 3.4 by increasing x from 0 to 0.5. The optical absorption coefficient was a complex function of composition and C-H, Ge-H, and Ge-C bonding. Mechanical stress in both materials was generally moderate, and increased with increasing C content for the GeC alloys and decreased with increasing C for the SiC alloys. The wide range of optical properties obtainable for both coating types makes them useful in many types of multilayer designs. Abrasion-resistant infrared (IR) multispectral antireflection coatings on zinc sulfide (ZnS) were demonstrated using Geij•9C and DLC layers.

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Peter M. Martin, John W. Johnston, and Wendy D. Bennett "Properties of reactively deposited SiC and GeC alloys", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22400

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