Survey of scanning electron microscopes using quantitative resolution evaluation

Gilles L. Fanget; Herve M. Martin; Brigitte Florin

doi:10.1117/12.275930

7 July 1997 Survey of scanning electron microscopes using quantitative resolution evaluation

Gilles L. Fanget, Herve M. Martin, Brigitte Florin

Proceedings Volume 3050, Metrology, Inspection, and Process Control for Microlithography XI; (1997) https://doi.org/10.1117/12.275930
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

Critical dimension scanning electron microscopes (CD SEM) resolution impacts on the quality of measurements. Previous works have proposed two dimensions fast Fourier transform image analysis, to get an operator free evaluation of the resolution. This method combined with a well suited sample leads to a powerful way to monitor the SEMs. A daily use enables us to quantify the effect of parameters that were previously hidden. It detects the need for service and is a non biased test for the equipment.

Citation Download Citation

Gilles L. Fanget, Herve M. Martin, and Brigitte Florin "Survey of scanning electron microscopes using quantitative resolution evaluation", Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); https://doi.org/10.1117/12.275930

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