Deposition of carbon nitride thin films by IR-laser-induced reactions in carbon-nitrogen gas-phase compounds

Aurelian Crunteanu; Rodica Alexandrescu; Raluca Cireasa; S. Cojocaru; Ion G. Morjan; A. Andrei; Ashock Kumar

doi:10.1117/12.312751

2 July 1998 Deposition of carbon nitride thin films by IR-laser-induced reactions in carbon-nitrogen gas-phase compounds

Aurelian Crunteanu, Rodica Alexandrescu, Raluca Cireasa, S. Cojocaru, Ion G. Morjan, A. Andrei, Ashock Kumar

Author Affiliations +

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312751
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

Since the theoretical studies of Liu and Cohen who predicted the existence of a superhard phase of carbon nitride, a great deal of effort was underdone in order to synthesize this hypothetical material with a nitrogen content as high as the 57% present in a (beta) -C₃N₄ structure. This study presents an attempt to produce CN_x thin films using the laser-induced CVD technique. CW CO₂ laser was used for irradiating various carbon-nitrogen containing mixtures such as C₂H₄/N₂O/NH₃. The CN_x films were grown alternatively on bare alumina ((alpha) - Al₂O₃) substrates and on pre-deposited Ti films. A comparative analysis of nitrogen incorporation in the films obtained in different experimental conditions was performed by means of the X-ray photoelectron spectroscopy. The same method was used to identify the chemical states of the CN system.

Citation Download Citation

Aurelian Crunteanu, Rodica Alexandrescu, Raluca Cireasa, S. Cojocaru, Ion G. Morjan, A. Andrei, and Ashock Kumar "Deposition of carbon nitride thin films by IR-laser-induced reactions in carbon-nitrogen gas-phase compounds", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312751

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available