Absolute measurement of surface profiles with phase-shifting projected fringe profilometry

Hongyu Liu; Benjamin A. Bard; Guowen Lu; Shudong Wu

doi:10.1117/12.369194

11 November 1999 Absolute measurement of surface profiles with phase-shifting projected fringe profilometry

Hongyu Liu, Benjamin A. Bard, Guowen Lu, Shudong Wu

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369194
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Phase-shifting projected fringe profilometry (PSPFP) is a powerful tool in the profile inspection of a large variety of rough surfaces. In many applications, absolute PSPFP measurements, capable of compensating for the lateral distortions in the measured object shape and providing an expression of the measured shape under a predefined reference system, are highly desired. In this paper, an absolute PSPFP technique combining the lateral calibration and the phase-to- depth calibration is proposed. The principles of the proposed absolute PSPFP measurement technique will be discussed together with the calibration and measurement methods based on a particular formalism of absolute PSPFP measurements.

Citation Download Citation

Hongyu Liu, Benjamin A. Bard, Guowen Lu, and Shudong Wu "Absolute measurement of surface profiles with phase-shifting projected fringe profilometry", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369194

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available