Accuracy enhancement of point triangulation probes for linear displacement measurement

Kyung-Chan Kim; Jong-Ahn Kim; SeBaek Oh; Soo Hyun Kim; Yoon Keun Kwak

doi:10.1117/12.380524

29 March 2000 Accuracy enhancement of point triangulation probes for linear displacement measurement

Kyung-Chan Kim, Jong-Ahn Kim, SeBaek Oh, Soo Hyun Kim, Yoon Keun Kwak

Proceedings Volume 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V; (2000) https://doi.org/10.1117/12.380524
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

Point triangulation probes (PTBs) fall into a general category of noncontact height or displacement measurement devices. PTBs are widely used for their simple structure, high resolution, and long operating range. However, there are several factors that must be taken into account in order to obtain high accuracy and reliability; measurement errors from inclinations of an object surface, probe signal fluctuations generated by speckle effects, power variation of a light source, electronic noises, and so on. In this paper, we propose a novel signal processing algorithm, named as EASDF (expanded average square difference function), for a newly designed PTB which is composed of an incoherent source (LED), a line scan array detector, a specially selected diffuse reflecting surface, and several optical components. The EASDF, which is a modified correlation function, is able to calculate displacement between the probe and the object surface effectively even if there are inclinations, power fluctuations, and noises.

Citation Download Citation

Kyung-Chan Kim, Jong-Ahn Kim, SeBaek Oh, Soo Hyun Kim, and Yoon Keun Kwak "Accuracy enhancement of point triangulation probes for linear displacement measurement", Proc. SPIE 3945, Laser Diodes and LEDs in Industrial, Measurement, Imaging, and Sensors Applications II; Testing, Packaging, and Reliability of Semiconductor Lasers V, (29 March 2000); https://doi.org/10.1117/12.380524

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