Decomposition of methylene blue with photocatalytic TiO2 thin films deposited by pulsed-laser deposition

Masayuki Okoshi; Yusuke Kosuge; Narumi Inoue; Tsugito Yamashita

doi:10.1117/12.486577

19 February 2003 Decomposition of methylene blue with photocatalytic TiO₂ thin films deposited by pulsed laser deposition

Masayuki Okoshi, Yusuke Kosuge, Narumi Inoue, Tsugito Yamashita

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486577
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Photocatalytic titanium dioxide (TiO₂) thin films with large specific surface area were deposited on Si wafers by pulsed laser deposition with sintered TiO₂ targets in oxygen gas atmosphere. Angular distributions of the number of droplets and the film thickness were examined. The surface roughness and the film thickness depended on the oxygen gas pressure. Photocatalytic effect of the films deposited at various substrate temperatures was evaluated by photobleaching of methylene-blue-aqueous solution. The TiO₂ film deposited at the substrate temperature of 250°C was anatase-type crystal and this film indicated the highest photocatalytic effect.

Citation Download Citation

Masayuki Okoshi, Yusuke Kosuge, Narumi Inoue, and Tsugito Yamashita "Decomposition of methylene blue with photocatalytic TiO₂ thin films deposited by pulsed laser deposition", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486577

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