Pathways to sub-10nm x-ray imaging using zone plate lens

Wenbing Yun; Michael Feser; Alan F. Lyon; Frederick Duewer; Yuxin Wang

doi:10.1117/12.568199

4 November 2004 Pathways to sub-10nm x-ray imaging using zone plate lens

Wenbing Yun, Michael Feser, Alan F. Lyon, Frederick Duewer, Yuxin Wang

Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.568199
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The spatial resolution is a key optical parameter characterizing the performance of an imaging microscope. Zone plate based x-ray microscopy offers the highest spatial resolution over the whole electromagnet wave spectrum. Sub-20 nm resolution have been demonstrated with soft x-rays and sub-60 nm resolution have been obtained with multikeV x-rays using a laboratory source. There are two simple pathways to achieve sub-10 nm resolution x-ray imaging: (1) improving the fabrication technology to produce zone plates with an outermost zone width less than 10 nm and (2) using a higher diffraction order (such as the third diffraction order) of a currently available zone plate.

Citation Download Citation

Wenbing Yun, Michael Feser, Alan F. Lyon, Frederick Duewer, and Yuxin Wang "Pathways to sub-10nm x-ray imaging using zone plate lens", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.568199

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