Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch

Dongqing Yin; Jinhui Lin; Qinghua Chen; Zhangyuan Chen; Anshi Xu; Wengang Wu

doi:10.1117/12.574098

31 January 2005 Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch

Dongqing Yin, Jinhui Lin, Qinghua Chen, Zhangyuan Chen, Anshi Xu, Wengang Wu

Proceedings Volume 5624, Semiconductor and Organic Optoelectronic Materials and Devices; (2005) https://doi.org/10.1117/12.574098
Event: Asia-Pacific Optical Communications, 2004, Beijing, China

Abstract

A novel driving scheme utilizing the resonance effect of the micro-mirror is presented to reduce the drive voltage of the silicon-based MEMS (microelectromechanical systems) torsion-mirror optical switch. A mixed bias of DC (direct current) and AC (alternating current) is adopted to drive the torsion mirror. Both the numerical simulation and experiment results show that the driving voltage of the optical switch is reduced by nearly 50%, from more than 270V to 130V.

Citation Download Citation

Dongqing Yin, Jinhui Lin, Qinghua Chen, Zhangyuan Chen, Anshi Xu, and Wengang Wu "Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch", Proc. SPIE 5624, Semiconductor and Organic Optoelectronic Materials and Devices, (31 January 2005); https://doi.org/10.1117/12.574098

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