Paper
21 February 2005 New challenges for VUV-XUV radiation resistant coatings
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Abstract
The paper proposes to review briefly steps of classical experimental progress towards resistant VUV-XUV coatings. It intends to address some of the new challenges of the VUV-XUV radiation resistant coatings, including material investigations, manufacturing, characterizations and active optical components.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexandre Gatto, Joerg Heber, Minghong Yang, Nicolas Benoit, Sergiy A. Yulin, Torsten Feigl, and Norbert Kaiser "New challenges for VUV-XUV radiation resistant coatings", Proc. SPIE 5647, Laser-Induced Damage in Optical Materials: 2004, (21 February 2005); https://doi.org/10.1117/12.583583
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KEYWORDS
Vacuum ultraviolet

Mirrors

Optical coatings

Micromirrors

Ultraviolet radiation

Reflectivity

Aluminum

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