Photo-etching of organic polymers using a laser plasma x-ray source based on a gas puff target irradiated with the PALS facility

Henryk Fiedorowicz; Andrzej Bartnik; Michal Bittner; Libor Juha; Josef Krasa; Pavel Kubat; Janusz Mikolajczyk; Rafal Rakowski

doi:10.1117/12.611333

23 March 2005 Photo-etching of organic polymers using a laser plasma x-ray source based on a gas puff target irradiated with the PALS facility

Henryk Fiedorowicz, Andrzej Bartnik, Michal Bittner, Libor Juha, Josef Krasa, Pavel Kubat, Janusz Mikolajczyk, Rafal Rakowski

Author Affiliations +

Proceedings Volume 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2005) https://doi.org/10.1117/12.611333
Event: XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2004, Prague, Czech Republic

Abstract

Experiments on direct photo-etching of organic polymers induced by high-intensity nanosecond pulses of soft X-ray radiation from a laser plasma X-ray source based on a gas puff target are presented. X-rays in the wavelength range from about 1 nm to 8 nm were produced by irradiation of the xenon/helium double-stream gas puff target with laser pulses from the Prague Asterix Laser System (PALS). The resulting X-ray pulses were used to irradiate samples from organic polymers and form microstructures. The results show relatively high efficiency of X-ray direct photo-etching that could be useful for micromachining of organic polymers.

Citation Download Citation

Henryk Fiedorowicz, Andrzej Bartnik, Michal Bittner, Libor Juha, Josef Krasa, Pavel Kubat, Janusz Mikolajczyk, and Rafal Rakowski "Photo-etching of organic polymers using a laser plasma x-ray source based on a gas puff target irradiated with the PALS facility", Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); https://doi.org/10.1117/12.611333

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available