Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis

Cedric Breluzeau; Alain Bosseboeuf; Sylvain Petitgrand; Xavier Leroux

doi:10.1117/12.612270

29 August 2005 Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis

Cedric Breluzeau, Alain Bosseboeuf, Sylvain Petitgrand, Xavier Leroux

Author Affiliations +

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580B (2005) https://doi.org/10.1117/12.612270
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Fringe pattern demodulation by the Fourier transform method associated with fringe extrapolation by the Gerchberg algorithm was investigated in details for its application to fast profiling of surfaces with small patterns and/or cuttings. For such surfaces, spectral leakage is a major concern as it corrupts data in a large part of the areas of interest if extrapolation is not carried out. Simulated fringe patterns or real interferograms recorded on micromechanical devices by interference microscopy were used for this evaluation. Different filter shapes in the Fourier space were tested for the determination of valid areas in the interferogram, for the fringe extrapolation stage and for the final phase demodulation. It is demonstrated that filters with a shape adapted to the modulation sidelobe in the Fourier space allow automated measurements without user expertise while maintaining a high accuracy. Some practical rules for the choice of extrapolation margins, fringe density, fringe extrapolation iteration number and other parameters are clarified to reach accurate and fast automated measurements.

Citation Download Citation

Cedric Breluzeau, Alain Bosseboeuf, Sylvain Petitgrand, and Xavier Leroux "Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580B (29 August 2005); https://doi.org/10.1117/12.612270

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available