FIB-based measurement of local residual stresses on microsystems

Dietmar Vogel; Neus Sabate D.D.S.; Astrid Gollhardt; Juergen Keller; Juergen Auersperg; Bernd Michel

doi:10.1117/12.658298

4 April 2006 FIB-based measurement of local residual stresses on microsystems

Dietmar Vogel, Neus Sabate D.D.S., Astrid Gollhardt, Juergen Keller, Juergen Auersperg, Bernd Michel

Proceedings Volume 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV; 617505 (2006) https://doi.org/10.1117/12.658298
Event: Nondestructive Evaluation for Health Monitoring and Diagnostics, 2006, San Diego, CA, United States

Abstract

The paper comprises research results obtained for stress determination on micro and nanotechnology components. It meets the concern of controlling stresses introduced to sensors, MEMS and electronics devices during different micromachining processes. The method bases on deformation measurement options made available inside focused ion beam equipment. Removing locally material by ion beam milling existing stresses / residual stresses lead to deformation fields around the milled feature. Digital image correlation techniques are used to extract deformation values from micrographs captured before and after milling. In the paper, two main milling features have been analyzed - through hole and through slit milling. Analytical solutions for stress release fields of in-plane stresses have been derived and compared to respective experimental findings. Their good agreement allows to settle a method for determination of residual stress values, which is demonstrated for thin membranes manufactured by silicon micro technology. Some emphasis is made on the elimination of main error sources for stress determination, like rigid body object displacements and rotations due to drifts of experimental conditions under FIB imaging. In order to illustrate potential application areas of the method residual stress suppression by ion implantation is evaluated by the method and reported here.

Citation Download Citation

Dietmar Vogel, Neus Sabate D.D.S., Astrid Gollhardt, Juergen Keller, Juergen Auersperg, and Bernd Michel "FIB-based measurement of local residual stresses on microsystems", Proc. SPIE 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV, 617505 (4 April 2006); https://doi.org/10.1117/12.658298

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available