Development of micro-mirrors in optical-electric printed wiring boards using excimer laser

T. Matsushima; K. Tanaka; T. Nakashiba; Y. Yagyu; M. Kubo

doi:10.1117/12.700116

20 March 2007 Development of micro-mirrors in optical-electric printed wiring boards using excimer laser

T. Matsushima, K. Tanaka, T. Nakashiba, Y. Yagyu, M. Kubo

Proceedings Volume 6459, Laser-based Micro- and Nanopackaging and Assembly; 64590A (2007) https://doi.org/10.1117/12.700116
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

Using excimer laser with 248 nm wavelength, we have been developed the 45-degree micro-mirrors in the polymer optical waveguide constructed by newly developed epoxy resin. The three-dimensional laser processing technology for controlling the mask aperture size on the laser beam is effective for fabricating the 45-degree mirror. The size of the mirror was about 80 micrometer width. Although the periodical micro patterns have appeared on the surface of the mirrors, we have successfully removed the patterns by the technique of smoothing. Smoothing process has been carried out by the additional laser irradiation with weak and/or strong energy. The obtained surface roughness of the mirrors was less than 120 nm (Ry). The evaluation of the optical loss using laser with 670 nm wavelength resulted in the less than 0.5 dB, indicating sufficient mirror performance.

Citation Download Citation

T. Matsushima, K. Tanaka, T. Nakashiba, Y. Yagyu, and M. Kubo "Development of micro-mirrors in optical-electric printed wiring boards using excimer laser", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590A (20 March 2007); https://doi.org/10.1117/12.700116

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available