Measurements and modeling of birefringence in PMMA channel waveguides inscribed with DUV radiation

Grzegorz Golojuch; Uwe Hollenbach; Timo Mappes; Jürgen Mohr; Adam Urbanczyk; Waclaw Urbanczyk

doi:10.1117/12.722959

16 May 2007 Measurements and modeling of birefringence in PMMA channel waveguides inscribed with DUV radiation

Grzegorz Golojuch, Uwe Hollenbach, Timo Mappes, Jürgen Mohr, Adam Urbanczyk, Waclaw Urbanczyk

Proceedings Volume 6585, Optical Sensing Technology and Applications; 65851W (2007) https://doi.org/10.1117/12.722959
Event: International Congress on Optics and Optoelectronics, 2007, Prague, Czech Republic

Abstract

We studied both experimentally and numerically the spectral behavior of modal birefringence in channel waveguides inscribed in PMMA by DUV illumination. The measurements of birefringence were carried out using spectral interference method for different waveguide widths, respectively 2, 3, 4, 5, 6 μm which were inscribed using 3 J/cm². We have also modeled the spectral dependence of birefringence related only to waveguide geometry using FEM method. High discrepancy reaching one order of magnitude was observed between measured and calculated birefringence. This is related to the fact that numerical analysis accounts only for so called geometrical birefringence induced by the asymmetry of the waveguide, while in measurements the overall modal birefringence relates to both the geometrical and the material effect. Our measurement results indicate that the contribution of the material birefringence in the analyzed waveguides may reach up to 3×10^-4 in a short wavelength range.

Citation Download Citation

Grzegorz Golojuch, Uwe Hollenbach, Timo Mappes, Jürgen Mohr, Adam Urbanczyk, and Waclaw Urbanczyk "Measurements and modeling of birefringence in PMMA channel waveguides inscribed with DUV radiation", Proc. SPIE 6585, Optical Sensing Technology and Applications, 65851W (16 May 2007); https://doi.org/10.1117/12.722959

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