Laser-Assisted Chemical And Morphological Modification Of Metallic Substrates

Julian P Partridge; Peter R Strutt

doi:10.1117/12.938951

25 November 1986 Laser-Assisted Chemical And Morphological Modification Of Metallic Substrates

Julian P Partridge, Peter R Strutt

Proceedings Volume 0669, Laser Applications in Chemistry; (1986) https://doi.org/10.1117/12.938951
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

The synthesis of silicon nitride surface layers on metal substrates by laser-activated deposition of organometallic precursors has been demonstrated. Advantages of this technique include high deposition rates, constancy of composition, and avoidance of toxic or pyrophor ic reactants. The uniform morphology surface layers of up to 20μm thickness contained 2000 Å diameter particles of amorphous silicon nitride. Auger electron spectroscopy and Fourier transform infrared reflection spectroscopy revealed there to be oxygen contamination at the surface. Attainment of a uniform morphology required a specific set of processing conditions. The presence of residual Si-CH₃bonds within the layers was shown to be reduced by subsequent laser heating. Suggestions are made for obtaining Si3N4 layers of improved purity, also for extending this approach by using a variety of organometallic precursors to obtain SiC and Si0_₂ layers.

Citation Download Citation

Julian P Partridge and Peter R Strutt "Laser-Assisted Chemical And Morphological Modification Of Metallic Substrates", Proc. SPIE 0669, Laser Applications in Chemistry, (25 November 1986); https://doi.org/10.1117/12.938951

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available