Micromechanical sensors based on lateral and longitudinal displacement of a cantilever sensing element: a comparative performance study

Jovan Matović; Zoran Jakšić

doi:10.1117/12.821655

18 May 2009 Micromechanical sensors based on lateral and longitudinal displacement of a cantilever sensing element: a comparative performance study

Jovan Matović, Zoran Jakšić

Author Affiliations +

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 73621E (2009) https://doi.org/10.1117/12.821655
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

The ultimate performance of modern mechanical sensors based on bimaterial cantilevers significantly lags behind the maximum values as limited by thermal fluctuations. Even more, the signal-to-noise ratios of novel MEMS sensors fall behind the characteristics of the previous generations of mechanical sensors fabricated by macroscopic production technologies. In this paper we present for the first time a comparative analysis of the ultimate detection limits of MEMS sensors based on bimaterial cantilever displacement and detectors based of longitudinal elongation of an equivalent cantilever. The starting point of our analysis was a definition of the correspondence between the transversal displacement of a bimaterial cantilever and the longitudinal elongation of the equivalent simple cantilever. These two structures generally cannot be directly compared, since the bimaterial cantilever displacement depends on 14 variables, while the longitudinal elongation of the simple cantilever depends on 7 parameters only. However, we show that under certain conditions a full correspondence can be established between the parameters of these two structures. The expansion coefficient is used here in its general sense to describe the linear length change as a function of a given external variable, for instance temperature, analyte concentration, photonic flux, etc.

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Jovan Matović and Zoran Jakšić "Micromechanical sensors based on lateral and longitudinal displacement of a cantilever sensing element: a comparative performance study", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621E (18 May 2009); https://doi.org/10.1117/12.821655

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