Ray-based calibration for the micro optical metrology system

Yongkai Yin; Meng Wang; Ameng Li; Xiaoli Liu; Xiang Peng

doi:10.1117/12.2051918

1 May 2014 Ray-based calibration for the micro optical metrology system

Yongkai Yin, Meng Wang, Ameng Li, Xiaoli Liu, Xiang Peng

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 91320K (2014) https://doi.org/10.1117/12.2051918
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

Fringe projection 3D microscopy (FP-3DM) plays an important role in micro-machining and micro-fabrication. FP-3DM may be realized with quite different arrangements and principles, which make people confused to select an appropriate one for their specific application. This paper introduces the ray-based general imaging model to describe the FP-3DM, which has the potential to get a unified expression for different system arrangements. Meanwhile the dedicated calibration procedure is also presented to realize quantitative 3D imaging. The validity and accuracy of proposed calibration approach is demonstrated with experiments.

Citation Download Citation

Yongkai Yin, Meng Wang, Ameng Li, Xiaoli Liu, and Xiang Peng "Ray-based calibration for the micro optical metrology system", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91320K (1 May 2014); https://doi.org/10.1117/12.2051918

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