Comparison Of Interferometric Contouring Techniques

Katherine Creath; James C. Wyant

doi:10.1117/12.947587

16 January 1989 Comparison Of Interferometric Contouring Techniques

Katherine Creath, James C. Wyant

Proceedings Volume 0954, Optical Testing and Metrology II; (1989) https://doi.org/10.1117/12.947587
Event: SPIE International Symposium on Optical Engineering and Industrial Sensing for Advance Manufacturing Technologies, 1988, Dearborn, MI, United States

Abstract

Projected fringe contouring, projection moire, shadow moire, and two-angle holographic contouring all measure surface height relative to a reference surface. A single theory can be used to describe all of these techniques. This paper compares these techniques with each other and with conventional interferometry. Quantitative data are obtained from projected fringe contouring and two-angle holographic contouring using phase-measurement interferometry techniques with a surface height measurement repeatability of 1/50 of the contour interval rms.

Citation Download Citation

Katherine Creath and James C. Wyant "Comparison Of Interferometric Contouring Techniques", Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); https://doi.org/10.1117/12.947587

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