Uncooled infrared detection with two-color microbolometers using a micro-optoelectromechanical systems tunable micromirror

Yuguang Gong; Wei Li; Hai-Hong Cai; Zhi Li; Chao Chen; Ya-Dong Jiang

doi:10.1117/1.3455343

1 July 2010 Uncooled infrared detection with two-color microbolometers using a micro-optoelectromechanical systems tunable micromirror

Yuguang Gong, Wei Li, Hai-Hong Cai, Zhi Li, Chao Chen, Ya-Dong Jiang

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 3, 031005 (July 2010). https://doi.org/10.1117/1.3455343

Abstract

A tunable reflecting micro-optoelectromechanical systems (MOEMS) micromirror is designed for measuring the actual temperature and color of an object based on comparison of two wavelength response windows, 3-5 and 8-12 µm. The MOEMS micromirror with switching between two positions by an applied electrostatic voltage provides a response to two wavelength windows by tuning the optical resonant cavity. Three different structural models of the tunable micromirror, which are made up of single Al layer with type I legs, single Al layer with type L legs, and double Al/Si₃N₄ layers with type I legs, are designed and simulated accurately using ANSYS tools on a 35-µm pixel-pitch array. On the basis of the comparsion, the third model, made up of double Al/Si₃N₄ layers with type I legs, is chosen. With different distances between the MOEMS micromirror and the bottom electrode, the total capacitance of the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage is calculated as 8.21 V by electrostatic-mechanical coupling analysis, and the maximum stress is 368.744 MPa, which is less than the yield strength of Si3N4 thin film. But if the voltage is increased to ~9.73 V, the micromirror will touch the bottom electrode by pull-in behavior.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yuguang Gong, Wei Li, Hai-Hong Cai, Zhi Li, Chao Chen, and Ya-Dong Jiang "Uncooled infrared detection with two-color microbolometers using a micro-optoelectromechanical systems tunable micromirror," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 031005 (1 July 2010). https://doi.org/10.1117/1.3455343

Published: 1 July 2010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available