Doubling the spatial resolution in capacitive tactile sensors

Mochtar Chandra; Shi-Yu Ke; Rongshun Chen; Cheng-Yao Lo

doi:10.1117/1.JMM.16.3.035001

20 July 2017 Doubling the spatial resolution in capacitive tactile sensors

Mochtar Chandra, Shi-Yu Ke, Rongshun Chen, Cheng-Yao Lo

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 16, Issue 3, 035001 (July 2017). https://doi.org/10.1117/1.JMM.16.3.035001

Abstract

A capacitive tactile sensor comprising two capacitors was developed to enhance detection by more than doubling the spatial resolution. This arrangement reduced the number of required capacitors from four to two and reconfigured the capacitor shape from square to rectangular, resulting in a symmetric spatial resolution in the x- and y-directions. The theoretical evaluations, simulation predictions, device fabrication, and data analysis conducted in this study yielded identical results. In addition, angle detection errors resulting from fabrication and material uncertainties were comprehensively examined for the first time. The evaluations performed regarding the capacitor configuration further indicated that the sensitivity of shear force detection in this study was optimized with the requirement of a symmetric design.

Citation Download Citation

Mochtar Chandra, Shi-Yu Ke, Rongshun Chen, and Cheng-Yao Lo "Doubling the spatial resolution in capacitive tactile sensors," Journal of Micro/Nanolithography, MEMS, and MOEMS 16(3), 035001 (20 July 2017). https://doi.org/10.1117/1.JMM.16.3.035001

Received: 16 March 2017; Accepted: 27 June 2017; Published: 20 July 2017

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