Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm

Bahram Azizollah Ganji; Burhanuddin Yeop Majlis

doi:10.1117/1.3091941

1 April 2009 Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 2, 021112 (April 2009). https://doi.org/10.1117/1.3091941

Abstract

A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm. According to the results, a clamped microphone with a 2.43×2.43-mm² diaphragm and a slotted one with a 1.5-×1.5-mm² diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped structure. The results also yield a sensitivity of 5.33×10⁻⁶ pF/Pa for the clamped and 3.87×10⁻⁵ pF/Pa for the slotted microphone with a 0.5×0.5-mm² diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The calculated pull-in voltage of the clamped microphone is 214 V, the measured pull-in voltage of the slotted one is 120 V. The pull-in voltage of the slotted microphone is about 50% decreased.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Bahram Azizollah Ganji and Burhanuddin Yeop Majlis "Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021112 (1 April 2009). https://doi.org/10.1117/1.3091941

Published: 1 April 2009

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