Microgripping force measuring device based on SU-8 microcantilever sensor

Ran Zhang; Jinkui Chu; Le Guan; Shuangliang Li; Jian Min

doi:10.1117/1.JMM.13.1.013007

6 February 2014 Microgripping force measuring device based on SU-8 microcantilever sensor

Ran Zhang, Jinkui Chu, Le Guan, Shuangliang Li, Jian Min

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 1, 013007 (February 2014). https://doi.org/10.1117/1.JMM.13.1.013007

Abstract

For the direct measurement of microgripper gripping force and the calibration of microgripper jaw stiffness, this paper presents a new microforce measuring device based on low-cost SU-8 microcantilever sensors with integrated copper piezoresistive strain gauge. On the basis of the deduced equations, the geometric parameters of the microcantilever sensor are determined. Then, the fabrication of the sensors is carried out using a simple process. One fabricated sensor is calibrated by measuring the output voltage and the applied vertical force simultaneously. The calibration result of the microcantilever stiffness is 2.99 N/m and the output sensitivity is 0.51 V/N . The performance test results of the calibrated sensor show that the force sensing range is 405 μN and the maximum nonlinearity is 11 μN. Finally, the microgripping forces of two different microgrippers are measured by the developed device, and jaw stiffness calibrations are also carried out. According to the experiment results, the normally closed SU-8 microgripper has a jaw stiffness of ∼2.83 N/m and the jaw stiffness of the normally open SU-8 microgripper is ∼7.22 N/m .

Citation Download Citation

Ran Zhang, Jinkui Chu, Le Guan, Shuangliang Li, and Jian Min "Microgripping force measuring device based on SU-8 microcantilever sensor," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(1), 013007 (6 February 2014). https://doi.org/10.1117/1.JMM.13.1.013007

Published: 6 February 2014

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