18 May 2023 Three-dimensional aerial images of periodic patterns and the depth of focus for lines-and-spaces patterns
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Abstract

A prescription for obtaining the three-dimensional irradiance of any periodic pattern is given and applied to obtaining the irradiance and the depth of focus (DOF) for lines-and-spaces patterns. As is well known, the DOF for such patterns can be made large by restricting the angular spread of the illuminating light. At a fixed k1, the so-called tip-to-tip distance between two opposing line-ends can be made smaller if the numerical aperture of the imaging optics is increased.

© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Anthony Yen "Three-dimensional aerial images of periodic patterns and the depth of focus for lines-and-spaces patterns," Journal of Micro/Nanopatterning, Materials, and Metrology 22(2), 020501 (18 May 2023). https://doi.org/10.1117/1.JMM.22.2.020501
Received: 30 January 2023; Accepted: 28 April 2023; Published: 18 May 2023
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KEYWORDS
3D image processing

Nanoimprint lithography

Diffraction gratings

3D mask effects

Diffraction

Imaging systems

Integrated circuits

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