Dr. Akio Higo Profile

Dr. Akio Higo

Assistant Prfessor at Tohoku Univ

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Author

Publications (3)

PROCEEDINGS ARTICLE | November 17, 2016

Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching

Proc. SPIE. 10027, Nanophotonics and Micro/Nano Optics III

KEYWORDS: Iron, Etching, Luminescence, Germanium, Ions, Gallium arsenide, Silicon, Nanolithography, Plasma, Nanowires

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PROCEEDINGS ARTICLE | March 13, 2013

InGaAsP optical device integration on SOI platform by Ar/O2 plasma assisted bonding

Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII

KEYWORDS: Optical components, Waveguides, Argon, Silicon, Oxygen, Semiconductor lasers, Electromagnetic coupling, Compound semiconductors, Plasma, Hybrid silicon lasers

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SPIE Journal Paper | April 1, 2011

Monolithically integrated low-loss three-dimensional spot-size converter and silicon photonic waveguides constructed by nanotuned Bosch process and oxidation

Li, Ling-Han , Higo, Akio , Sugiyama, Masakazu , Nakano, Yoshiaki

JM3 Vol. 10 Issue 02

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