Dr. Changheon Lee Profile

Dr. Changheon Lee

at SAMSUNG Advanced Institute of Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 April 2023 Presentation

Kyuhyun Im, Younhyun Kwak, Minsang Kim, Changheon Lee

Proceedings Volume 12498, 124980L (2023) https://doi.org/10.1117/12.2657610

KEYWORDS: Photoresist materials, Polymers, Liquids, Chromatography, Extreme ultraviolet, Semiconductors, Lithography, High volume manufacturing

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Keywords/Phrases