Mr. Fin Röhr Profile

Fin Röhr

at Fraunhofer-ISIT

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 12 March 2024 Presentation + Paper

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

J.-Y. Hwang, E. Yarar, L. Wysocki, F. Röhr, G. Wille, S. Gu-Stoppel

Proceedings Volume 12899, 128990E (2024) https://doi.org/10.1117/12.2692907

KEYWORDS: Mirrors, Microelectromechanical systems, Aluminum scandium nitride, Aluminum nitride, Piezoelectric materials, Laser scanners, Optical scanning systems

Read Abstract +

This paper presents the feasibility of implementing various scan patterns, ranging from quasi-static to resonant driving methods, using newly developed 3D-constructed Al(Sc)N piezoelectric MEMS mirrors. A description of the assembled device and how each driving method was tried and characterized are also provided. According to the quasi-static driving test result, tilting angle of ±10° was achieved by both AlN and AlScN based-MEMS mirrors. For 1D resonant scanning, total optical scan angle (TOSA) of 20° was obtained under the low applied voltage of 1.5 V_pp. Further investigations were conducted on various 2D scan patterns, including Lissajous and circular scans. The characterization results show that Lissajous scan patterns with various field-of-view (FOV) sizes can be realized by adjusting the applied voltage and driving frequencies. In the case of circular scan, a TOSA of 10° was achieved, demonstrating the potential for 360° of omnidirectional scanning using the presented mirror devices. In addition, assessments of the electrical stability of fabricated piezoelectric material under high voltage and the mechanical robustness based on long-term cycling tests were conducted to ensure the reliability of the device. The presented low-power compact Al(Sc)N-based piezoelectric MEMS mirror device possesses a wide range of specifications, affording it the capability for application and customization to meet various purposes, while also holding significant potential for further advancements in its utility.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years