Dr. Lena Wysocki Profile

Dr. Lena Wysocki

at Fraunhofer-ISIT

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Author

Publications (3)

Proceedings Article | 12 March 2024 Presentation + Paper

Biaxial resonant MEMS mirrors with large field of view for LiDAR systems

L. Wysocki, J.-Y. Hwang, P. Schütt, P. Raschdorf, E. Yarar, G. Wille, S. Gu-Stoppel

Proceedings Volume 12899, 128990H (2024) https://doi.org/10.1117/12.3002711

KEYWORDS: Mirrors, Design, Microelectromechanical systems, LIDAR, Silicon, Actuators, Semiconducting wafers, Robots

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Proceedings Article | 12 March 2024 Presentation + Paper

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

J.-Y. Hwang, E. Yarar, L. Wysocki, F. Röhr, G. Wille, S. Gu-Stoppel

Proceedings Volume 12899, 128990E (2024) https://doi.org/10.1117/12.2692907

KEYWORDS: Mirrors, Microelectromechanical systems, Aluminum scandium nitride, Aluminum nitride, Piezoelectric materials, Laser scanners, Optical scanning systems

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Proceedings Article | 15 March 2023 Presentation + Paper

Efficient piezoelectric gimbal-less MEMS-mirror with large design flexibility

L. Wysocki, L. Ratzmann, P. Schütt, J. Albers, G. Wille, S. Gu-Stoppel

Proceedings Volume 12434, 124340H (2023) https://doi.org/10.1117/12.2647807

KEYWORDS: Design and modelling, Projection systems, Mirrors, Augmented reality, Windows, Actuators, Semiconducting wafers, Optical scanning, Silicon

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Biaxial resonant MEMS-scanners are considered as promising core-device in state-of-the-art imaging and projection systems due to their compactness, the large field-of-view, high speed, and comparably low power consumption. However, the usage in three-dimensional LIDAR modules or projectors for industrial applications is often limited by non-optimal Lissajous-scanning patterns. To achieve dense and spatially uniform Lissajous-trajectories, a suitable frequency ratio of the two oscillation modes is essential. In previous works, the frequency ratio was either maximized or minimized, which often led either to mechanical fragility or undesirable coupling of the two normal modes. For solving the abovementioned problems, a piezoelectrically-driven biaxial MEMS-scanner exhibiting large design flexibility, enabling the individual tailoring of the two orthogonal rotational oscillation-modes and Lissajous-patterns with large fill factor, was developed. This design freedom and decoupling of two axes motions are achieved by a gimbal-less design with individual actuator systems for the two oscillatory axes. Driven by the CMOS-compatible piezoelectric Al(Sc)N, the Q-factor of the resonant mirror with large optical aperture of 5 mm is enhanced by hermetic wafer-level glass-encapsulation. A projection module, which combines the biaxial MEMS-scanner, an RGB-laser-beam combiner, and the electronics for both read-out and control, was developed in the frame of a funded research project (”MEMS-scanner-based laser projection system for maritime augmented reality”). The target of the project was the development of a smart window, in the sense of a MEMS-scanner-based laser projection system for maritime augmented reality, which offers the possibility to fade in safety-relevant information of navigation and ship sensors into the field-of-view of the bridge personnel on the ship’s bridge. Such projector is promising also for further applications in industry, for instance in 3D cameras.

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