Prof. Frédéric Chausse Profile

Prof. Frédéric Chausse

at Institut Pascal

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Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Edge detection using deep learning pipelines for TEM and SEM metrology by proposing generic and specific approaches

Edgar Loza, Julien Baderot, Marion Grould, Emilie Pery, Frédéric Chausse, Sergio Martinez, Johann Foucher

Proceedings Volume 12496, 124962P (2023) https://doi.org/10.1117/12.2657908

KEYWORDS: Edge detection, Metrology, Scanning electron microscopy, Data modeling, Transmission electron microscopy, Deep learning, Semiconductors, Critical dimension metrology

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