KEYWORDS: Semiconducting wafers, Deep ultraviolet, Error analysis, Control systems, Optical lithography, Photoresist processing, Signal detection, Telecommunications, Data communications, Silicon
Defectivity requirements are constantly put to new standards, even in older
factories where new toolsets aren't a feasible alternative. To prolong the life of this
equipment, Integrated Designs has created the digital dispense valve system. Tracks with
older pump systems are plagued with repeatability and suckback issues that are key
factors in eliminating or reducing defectivity. The digital dispense system not only
increases the pump's capability to hold suckback across significant amounts of idle time
regardless of viscosity, but also allows for lower dispense volumes due to more
repeatable dispenses. Combining these factors results in a significant decrease in
defectivity with only minor equipment additions, that previously would have required
costly pump and track upgrades.
Resist minimization techniques have been around since the mid-1990s. As the volume decreases, the accuracy of the systems must increase. These inaccuracies can negate any savings that could potentially be acquired due to rework or even scrap. This has become a problem for older factories with pumps that are not accurate below 2.0ml. In order to help with these issues, Integrated Designs has created the digital dispense valve. This mechanical addition can prolong the life of a pump and saving the costly pump replacement scenario. The digital dispense valve increases the accuracy at lower dispense volumes and give more repeatable suckback control than was previously available for this generation of pump systems.
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