Hagen Saemrow
at Univ Rostock
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 May 2009 Paper
Hagen Saemrow, Claas Cornelius, Frank Sill, Andreas Tockhorn, Dirk Timmermann
Proceedings Volume 7363, 736310 (2009) https://doi.org/10.1117/12.821711
KEYWORDS: Transistors, Reliability, Oxides, Logic, Switching, Integrated circuits, Manufacturing, Integrated circuit design, System integration, Computer aided design

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