External cavity diode lasers (ECDLs) are a well-established laboratory tool due to their excellent emission properties. However, if the ECDLs are used outside the laboratory, they have limitations in terms of tuning speed and robustness. For overcoming these limitations, we developed a new micro-electro-mechanical system (MEMS) based ECDL cavity concept. The 1D MEMS actuator defines the angle of incidence at the diffraction grating as well as the cavity length of the ECDL. Due to the high resonance frequency of the MEMS actuator in the kHz range, the switching speed of the ECDL emission wavelength is drastically reduced. Furthermore, the MEMS actuator minimizes the sensitivity to external disturbance which opens a path to handheld wide mode-hop free tunable ECDLs in the near future. Therefore we have also optimized our curved waveguide concept based on GaSb for the ECDL design, whereby a wavelength range from NIR to the MIR range can be better covered. These features qualify the new developed MEMS tunable ECDL for the high demands of the high resolution multi-species molecular spectroscopy. Application examples of the MEMS based ECDL and the curved gain chips will be provided.
Tunable diode lasers are an important tool for spectroscopy and as laser sources for a wide range of applications. In this paper, an improvement of External Cavity Diode Lasers (ECDLs) is presented. The present generation of ECDLs is designed as a laboratory instrument which is sensitive against ambient disturbance like shock, noise, and temperature fluctuations. In addition, state of the art ECDLs in Littrow and Littman/Metcalf configuration have limitations in terms of tuning range, tuning speed, and size. These technologically disadvantages make it difficult to use ECDLs for various applications. Therefore, we developed a new miniaturized mode-hop free tunable next-generation ECDL design based on a Micro Electro Mechanical System (MEMS) device. It includes the benefits of the current ECDL technology and allows an outstanding improvement in terms of efficiency, stability, repeatability and tuning range. Moreover, the tuning speed is increased into the kHz regime due to the fast nature of the tilting capabilities of the MEMS actuators. The focus will be set on the initial use of this new design in connection with semiconductor laser chips based on GaAs, InP, GaSb and IC. This makes it possible to cover a large area from the near-infrared up to the mid-infrared. Especially the midinfrared contains stronger absorption lines of significant gases, which are of great interest in the field of biomedicine, process control and environmental monitoring. The excellent performance of this innovative ECDL cavity design as well as the low noise promises better possibilities of gas detection for the previously mentioned applications.
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