Dr. Isabelle Séguy Profile

Dr. Isabelle Séguy

at LAAS CNRS

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 13 March 2024 Presentation + Paper

Shadow-mask evaporation for the fabrication of optical filters with spatially tailored thickness

S. Calvez, J. Bonneau, D. Bourrier, L. Salvagnac, P. Dubreuil, I. Séguy, H. Camon

Proceedings Volume 12898, 128980J (2024) https://doi.org/10.1117/12.3000178

KEYWORDS: Optical filters, Interferometers, Tunable filters

Read Abstract +

The fabrication of optical filters whose reflection/transmission response is spatially-graded has been the object of numerous research studies over the past decades given their applications in areas including multi- and hyperspectral imaging, structural colouring and even holographic encryption. In this context, the key enabling feature is the ability to tailor the thickness profile of at least one layer of the optical coating multilayer stack. To-date, this 3-dimensional structuration has been achieved either at the deposition stage or as an additional post-deposition process step. In the former case, the technique relies on the shaping of the material deposition flux thanks to the insertion of a (moving) mask inside the evaporation or sputtering machine. As such, the method is usually limited to the implementation of centimetre-scale variations. A contrario, to reach sub-millimeter-scale features, the preferred approach is based on postdeposition layer structuration, which is performed using grayscale lithography in the form of multi-(mask-)level optical lithography, or using e-beam or laser lithography. All these approaches are nevertheless relatively complex since they involve either multiple steps or need a very precise calibration of the exposition curve. In this paper, we report that the evaporation through re-usable shadow masks can be used to create optical filters whose spatial variations can be controlled with a ~70-µm-resolution. Using metal-mirror Fabry-Pérot interferometer structures as representative optical filters, we demonstrate the ability to adjust the resonance wavelength, the filter bandwidth and extinction ratio, and the coupling strength and splitting in cascaded resonators.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years