Dr. Junmyung Lee Profile

Dr. Junmyung Lee

at Korea Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 December 2016 Paper

Junmyung Lee, Kwang-Ho Kwon, A. Efremov

Proceedings Volume 10224, 102241U (2016) https://doi.org/10.1117/12.2266348

KEYWORDS: Oxygen, Plasma, Argon, Chemical species, Ions, Etching, Polymers, Dry etching, Carbon monoxide, Autoregressive models

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Keywords/Phrases